TY  - CONF
AU  - James Potzick
C2  - 18th Annual SPIE/BACUS Symposium on Photomask Technology and Management
DA  - 1998-09-01
LA  - en
PB  - 18th Annual SPIE/BACUS Symposium on Photomask Technology and Management
PY  - 1998
TI  - Accuracy Differences Among Photomask Metrology Tools--and Why They Matter
ER  -