TY  - CONF
AU  - Michael Postek
C2  - Proceedings of SPIE, Microlithography and Metrology in Micromachining III, Craig R. Friedrich, Akira Umeda, Editors, Austin, TX
DA  - 1997-09-01
LA  - en
M1  - 3225
PB  - Proceedings of SPIE, Microlithography and Metrology in Micromachining III, Craig R. Friedrich, Akira Umeda, Editors, Austin, TX
PY  - 1997
TI  - Potentials for Inspection and Metrology of MEMS Using a Combined Scanning Electron Microscope (SEM) and Proximal Probe Microscope (PPM)
ER  -