TY  - CONF
AU  - James Potzick
C2  - Proceedings of SPIE, 20th Annual BACUS Symposium on Photomask Technology, Brian J. Grenon, Giang T. Dao, Editors, Monterey, CA
DA  - 2001-01-01
LA  - en
M1  - 4186
PB  - Proceedings of SPIE, 20th Annual BACUS Symposium on Photomask Technology, Brian J. Grenon, Giang T. Dao, Editors, Monterey, CA
PY  - 2001
TI  - Neolithography Consortium: A Progress Report
ER  -