TY  - CONF
AU  - James Potzick
C2  - Proceedings of SPIE, Kanagawa, JA
DA  - 1995-07-01
LA  - en
M1  - 2512
PB  - Proceedings of SPIE, Kanagawa, JA
PY  - 1995
TI  - Improved Photomask Metrology Through Exposure Emulation
ER  -