TY  - CONF
AU  - James Potzick
C2  - International Symposium on Laser Metrology, Florianopolis, BR
DA  - 1999-01-01
LA  - en
PB  - International Symposium on Laser Metrology, Florianopolis, BR
PY  - 1999
TI  - Measurement Uncertainty and Noise in Nanometrology
ER  -