TY  - CONF
AU  - James Potzick
C2  - Proceedings of SPIE, Santa Clara, CA
DA  - 1995-05-01
LA  - en
M1  - 2439
PB  - Proceedings of SPIE, Santa Clara, CA
PY  - 1995
TI  - Re-Evaluation of the Accuracy of NIST Photomask Linewidth Standards
ER  -