TY  - CONF
AU  - Richard Silver
AU  - Ravikiran Attota
AU  - Michael Stocker
AU  - Jay Jun
AU  - Egon Marx
AU  - Robert Larrabee
AU  - B Russo
AU  - M Davidson
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVI, Daniel J. C. Herr, Editor, Santa Clara, CA
DA  - 2002-07-01
LA  - en
M1  - 4689
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVI, Daniel J. C. Herr, Editor, Santa Clara, CA
PY  - 2002
TI  - Comparison of Measured Optical Image Profiles of Silicon Lines with Two Different Theoretical Models
ER  -