TY  - VIDEO
AU  - John Villarrubia
AU  - Ronald Dixson
AU  - Samuel Jones
AU  - J Lowney
AU  - Michael Postek
C2  - Transfer Document; NIST/SEMATECH Proprietary
DA  - 2000-01-01
LA  - en
PB  - Transfer Document; NIST/SEMATECH Proprietary
PY  - 2000
TI  - Final Report: 1998-1999 NIST/SEMATECH Project on Intercomparison of Linewidth Measurement Methods
ER  -