TY  - JOUR
AU  - James Potzick
AU  - J Pedulla
AU  - Michael Stocker
C2  - Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
DA  - 2003-01-01
LA  - en
M1  - 5038-34
PB  - Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
PY  - 2003
TI  - Updated NIST Photomask Linewidth Standard
ER  -