TY  - CONF
AU  - James Potzick
C2  - Proceedings of SPIE, Santa Clara, CA
DA  - 1994-12-01
LA  - en
M1  - 2322
PB  - Proceedings of SPIE, Santa Clara, CA
PY  - 1994
TI  - Improving Photomask Linewidth Measurement Accuracy via Emulated Stepper Aerial Image Measurement
ER  -