TY  - CONF
AU  - James Potzick
C2  - Proceedings of SPIE, 18th Annual BACUS Symposium on Photomask Technology and Management, Brian J. Grenon, Frank E. Abboud, Editors, Redwood City, CA
DA  - 1998-12-01
LA  - en
M1  - 3546
PB  - Proceedings of SPIE, 18th Annual BACUS Symposium on Photomask Technology and Management, Brian J. Grenon, Frank E. Abboud, Editors, Redwood City, CA
PY  - 1998
TI  - Accuracy Differences Among Photomask Metrology Tools and Why They Matter
ER  -