TY  - CONF
AU  - John Kramar
AU  - Jay Jun
AU  - William Penzes
AU  - Fredric Scire
AU  - E Teague
AU  - John Villarrubia
C2  - Proceedings of SPIE,, Denver, CO
DA  - 1999-11-01
LA  - en
M1  - 3806
PB  - Proceedings of SPIE,, Denver, CO
PY  - 1999
TI  - Grating Pitch Measurements With the Molecular Measuring Machine
ER  -