TY  - JOUR
AU  - Michael Postek
AU  - Andras Vladar
AU  - O Wells
AU  - J Lowney
C2  - Scanning
DA  - 2001-09-01
LA  - en
M1  - 23(5)
PB  - Scanning
PY  - 2001
TI  - Application of the Low-Loss Scanning Electron Microscope Image to Integrated Circuit Technology Part 1-Applications to Accurate Dimension Measurements
ER  -