TY  - JOUR
AU  - Michael Postek
AU  - Andras Vladar
AU  - John Villarrubia
C2  - SPIE Microlithography Conference
DA  - 2000-06-01
LA  - en
M1  - 3998
PB  - SPIE Microlithography Conference
PY  - 2000
TI  - Is a Production Level Scanning Electron Microscope Linewidth Standard Possible?
ER  -