TY  - CONF
AU  - Samuel Dongmo
AU  - John Villarrubia
AU  - Samuel Jones
AU  - Thomas Renegar
AU  - Michael Postek
AU  - Jun-Feng Song
C2  - Characterization and Metrology for ULSI Technology 1998 International Conference
DA  - 1998-03-01
LA  - en
PB  - Characterization and Metrology for ULSI Technology 1998 International Conference
PY  - 1998
TI  - Tip Characterization for Scanned Probe Microscope Width Metrology
ER  -