TY  - CONF
AU  - James Potzick
C2  - Proceedings of SPIE, Microlithography and Metrology in Micromachining II, Michael T. Postek, Jr., Craig R. Friedrich, Editors, Austin, TX
DA  - 1996-09-01
LA  - en
M1  - 2880
PB  - Proceedings of SPIE, Microlithography and Metrology in Micromachining II, Michael T. Postek, Jr., Craig R. Friedrich, Editors, Austin, TX
PY  - 1996
TI  - New Certified Length Scale for Microfabrication Metrology
ER  -