TY  - JOUR
AU  - Martin Green
AU  - Andrew Allen
AU  - Xiang Li
AU  - Junling Wang
AU  - J Ilavsky
AU  - A Delabie
AU  - R Puurunen
AU  - B Brijs
C2  - Applied Physics Letters
DA  - 2006-01-16
LA  - en
M1  - 88
PB  - Applied Physics Letters
PY  - 2006
TI  - The Nucleation of Atomic Layer Deposited HfO2 Films, and Evolution of Their Microstruture, Studied by Grazing Incidence Small Angle X-ray Scattering Using Synchrotron Radiation
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854304
ER  -