TY  - JOUR
AU  - Nhan Nguyen
AU  - Safak Sayan
AU  - Igor Levin
AU  - James Ehrstein
AU  - I.J.R. Baumvol
AU  - C. Driemeier
AU  - L Wielunski
AU  - Pui-Yee Hung
AU  - Alain Diebold
C2  - Journal of Vacuum Science and Technology A
DA  - 2005-11-17
LA  - en
M1  - 23
PB  - Journal of Vacuum Science and Technology A
PY  - 2005
TI  - Optical Bandgaps and Composition Dependence of Hafnium Aluminate Thin Films grown by Atomic Layer Chemical Vapor Deposition
ER  -