TY - CONF AU - Afridi, Muhammad AU - Hefner, Allen AU - Geist, Jon AU - Hood, Colleen AU - Varma, Ankush AU - Jacob, Bruce C2 - 2005 International Semiconductor Device Research Symposium, Bethesda, MD DA - 2005-12-09 LA - en PB - 2005 International Semiconductor Device Research Symposium, Bethesda, MD PY - 2005 TI - Microhotplate-Based Sensor Platform for Submicron SoC Designs UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32489 ER -