TY  - CONF
AU  - Kevin Lyons
AU  - Michael Postek
C2  - SPIE NanoScience and Engineering, San Diego, CA
DA  - 2008-08-06
LA  - en
PB  - SPIE NanoScience and Engineering, San Diego, CA
PY  - 2008
TI  - Metrology at the Nanoscale: What are the Grand Challenges?
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824701
ER  -