TY  - JOUR
AU  - Nakamura, Nathan
AU  - Szypryt, Paul
AU  - Fowler, Joseph
AU  - Levine, Zachary H.
AU  - Swetz, Daniel
C2  - IEEE Xplore Digital Library
DA  - 2023-11-20 05:11:00
LA  - en
PB  - IEEE Xplore Digital Library
PY  - 2023
TI  - Nanoscale X-ray Tomography of Integrated Circuits using a Hybrid Electron/X-ray Microscope: Results and Prospects
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=956624
ER  -