TY  - GEN
AU  - Elizabeth Rasmussen
AU  - Boris Wilthan
AU  - Brian Simonds
C2  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2023-08-22 04:08:00
DO  - https://doi.org/10.6028/NIST.SP.1500-208
LA  - en
PB  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2023
TI  - Report from the Extreme Ultraviolet (EUV) Lithography Working Group Meeting: Current State, Needs, and Path Forward
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=956144
ER  -