TY  - JOUR
AU  - Robert F. Berg
AU  - Charles S. Tarrio
AU  - Thomas B. Lucatorto
C2  - Journal of Vacuum Science & Technology A
DA  - 2023-03-22 04:03:00
DO  - https://doi.org/10.1116/6.0002432
LA  - en
M1  - 41
PB  - Journal of Vacuum Science & Technology A
PY  - 2023
TI  - Measurements and model of UV-induced oxidation of aluminum
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=935448
ER  -