TY  - GEN
AU  - C Allocca
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2005-04-15
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2005
TI  - Nanometrology - FY 2004 Programs and Selected Accomplishments
ER  -