TY  - VIDEO
AU  - Michael Postek
AU  - Robert Larrabee
AU  - William Keery
C2  - EMSA Bulletin
DA  - 1987-12-31
LA  - en
PB  - EMSA Bulletin
PY  - 1987
TI  - Scanning Electron Microscope Linewidth Measurement Standards Programat the National Bureau of Standards
ER  -