TY  - CONF
AU  - Barry Bauer
AU  - R Hedden
AU  - Hae-Jeong Lee
AU  - Christopher Soles
AU  - Da-Wei Liu
C2  - Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics | 2003 |
DA  - 2003-04-01
LA  - en
M1  - 766
PB  - Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics | 2003 |
PY  - 2003
TI  - Determination of Pore Size Distributions in Nanoporous Low-K Thin Films From Small Angle Neutron Scattering
ER  -