TY  - JOUR
AU  - John Gillen
AU  - R King
AU  - F Chmara
C2  - Journal of Vacuum Science and Technology
DA  - 1999-05-01
LA  - en
M1  - 17
PB  - Journal of Vacuum Science and Technology
PY  - 1999
TI  - Development of a Triplasmatron Ion Source for the Generation of SF<sub>5</sub>+ and F- Primary Ion Beams on an Ion Microscope Secondary Ion Mass Spectrometry Instrument
ER  -