TY  - JOUR
AU  - William Wallace
AU  - Kathleen Flynn
AU  - Joseph Antonucci
C2  - Polymer Preprints
DA  - 2001-04-01
LA  - en
PB  - Polymer Preprints
PY  - 2001
TI  - Mass Spectrometry of Spin-On-Glass Low-K Dielectric Precursors
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851802
ER  -