TY  - JOUR
AU  - Brent Sperling
AU  - William Kimes
AU  - James Maslar
C2  - Applied Surface Science
DA  - 2010-06-01
DO  - https://doi.org/10.1016/j.apsusc.2010.03.050
LA  - en
M1  - 256
PB  - Applied Surface Science
PY  - 2010
TI  - Reflection Absorption Infrared Spectroscopy During Atomic Layer Deposition of HfO2 Films From Tetrakis (ethylmethylamido) Hafnium and Water
ER  -