TY  - ICOMM
AU  - John Villarrubia
C1  - http://ismi.sematech.org/
C2  - ISMI
DA  - 2010-03-01
LA  - en
PB  - ISMI
PY  - 2010
TI  - NIST Simulation of E-beam Inspection and CD-SEM in-line metrology: Interim Report for 1st year of project
ER  -