@conference{97596,
  author = {Kevin Lee},
  title = {A Lithium-drift Technique for Making Submicrometer Thick Silicon Membranes},
  year = {1992},
  month = {1992-10-01},
  publisher = {Proc. Symposium on Electrochemical Microfabrication, Pennington, NJ},
  language = {en},
}