@misc{96001,
  author = {Ronald Dixson},
  title = {Reference Measurement System Using Critical Dimension Atomic Force Microscopy (CD-AFM): Final Report},
  year = {2005},
  month = {2005-01-01},
  publisher = {Reference Measurement System Using Critical Dimension Atomic Force Microscopy (CD-AFM): Final Report},
  language = {en},
}