@article{95986,
  author = {John Villarrubia and Andras Vladar and Michael Postek},
  title = {Scanning Electron Microscope Dimensional Metrology using a Model-based Library},
  year = {2005},
  number = {37},
  month = {2005-01-01},
  publisher = {Surface and Interface Analysis},
  language = {en},
}