@misc{95936,
  author = {Andras Vladar and Michael Postek},
  title = {NIST/SEMATECH Collaboration: Application of Nano-Tips to Production CD-SEMs},
  year = {2001},
  month = {2001-01-01},
  publisher = {NIST/SEMATECH Collaboration LITG 410I Project Final Report},
  language = {en},
}