@conference{95931,
  author = {Richard Silver and Ravikiran Attota and Michael Stocker and M Bishop and Lowell Howard and Thomas Germer and Egon Marx and M Davidson and Robert Larrabee},
  title = {High-resolution Optical Metrology},
  year = {2005},
  number = {5752},
  month = {2005-05-01},
  publisher = {Proceedings of SPIE, San Jose, CA},
  language = {en},
}