@conference{95661,
  author = {Michael Postek and Andras Vladar},
  title = {Application of High Pressure/Environmental Scanning Electron Microscopy to Photomask Dimensional Metrology},
  year = {2003},
  number = {683},
  month = {2003-01-01},
  publisher = {Proceedings of 2003 International Conference on CP683 Characterization and Metrology for ULSI Technology, D.G. Seiler, A.C. Dielbold, T.J. Shaffner, R. McDonald, D. Zollner, R.P. Khosla, and E.M. Secula, Editors, Unknown, USA},
  language = {en},
}