@conference{95541,
  author = {Ndubuisi Orji and Theodore Vorburger and Xiaohong Gu and Jayaraman Raja},
  title = {Scale-Space Analysis of Line Edge Roughness on 193 nm Lithography Test Structures},
  year = {2003},
  month = {2003-01-01},
  publisher = {Proceedings of American Society for Precision Engineering 2003 Annual Meeting, Raliegh, NC},
  language = {en},
}