@article{95476,
  author = {John Villarrubia and Andras Vladar and Michael Postek},
  title = {Scanning Electron Microscope Dimensional Metrology Using a Model-Based Library},
  year = {2005},
  number = {37},
  month = {2005-04-01},
  publisher = {Surface and Interface Analysis},
  language = {en},
}