@misc{95366,
  author = {Andras Vladar and Michael Postek},
  title = {Final Report, 1998-1999 NIST/SEMATECH Collaboration for Improvement of High-Accuracy Critical-Dimension Meetrology for Semiconductor Manufacturing},
  year = {1999},
  month = {1999-12-14},
  publisher = {NIST/SEMATECH Proprietary Document},
  language = {en},
}