@misc{95351,
  author = {Michael Stocker and Richard Silver and Ravikiran Attota and Jay Jun},
  title = {Calibrated Overlay Wafer Standard},
  year = {2007},
  month = {2007-01-01},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.SP.260-165},
  language = {en},
}