@article{95316,
  author = {Ronald Dixson and Richard Allen and William Guthrie and Michael Cresswell},
  title = {Traceable Calibration of Critical-Dimension Atomic Force Microscope Linewidth Measurements with Nanometer Uncertainty},
  year = {2005},
  number = {23},
  month = {2005-01-01},
  publisher = {J. Vacuum Sci. Technol. B},
  language = {en},
}