@article{95241,
  author = {Hyug-Gyo Rhee and Theodore Vorburger and Jonathan Lee and Joseph Fu},
  title = {Discrepancies Between Roughness Measurements Obtained With Phase Shifting and White-Light Interferometry},
  year = {2005},
  number = {44},
  month = {2005-10-01},
  publisher = {Applied Optics},
  language = {en},
}