@conference{95166, author = {John Dagata and T Inoue and J Itoh and K Matsumoto and H Yokoyama}, title = {Voltage Modulation Scanned Probe Oxidation (Abstract)}, year = {1998}, month = {1998-01-01}, publisher = {Microprocesses and Nanotechnology Conference, Kyoungju, KO}, language = {en}, }