@misc{95121,
  author = {Michael Postek},
  title = {Interim Report, NIST/SEMATECH Collaboration for Improvement of High-Accuracy Critical-Dimension Meetrology for Semiconductor Manufacturing},
  year = {1997},
  month = {1997-10-31},
  publisher = {NIST/SEMATECH Proprietary Document},
  language = {en},
}