@article{94806,
  author = {Yifu Ding and Hyun and Jack Douglas and Ronald Jones and Daniel Hines and Alamgir Karim and Christopher Soles},
  title = {Polymer Viscoelasticity and Residual Stress Effects on Nanoimprint Lithography},
  year = {2007},
  number = {19},
  month = {2007-05-24},
  publisher = {Advanced Materials},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852665},
  language = {en},
}