@conference{94536,
  author = {Ronald Jones and T Hu and Vivek Prabhu and Christopher Soles and Eric Lin and Wen-Li Wu and D Goldfarb and M Angelopoulos},
  title = {Form of Deprotection in Chemically Amplified Resists},
  year = {2003},
  number = {683},
  month = {2003-09-01},
  publisher = {CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY: 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, TX},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852161},
  language = {en},
}