@article{94266,
  author = {Vivek Prabhu and Ronald Jones and Eric Lin and Wen-Li Wu},
  title = {Polyelectrolyte Effects in Model Photoresist Developer Solutions},
  year = {2003},
  number = {21},
  month = {2003-08-01},
  publisher = {Journal of Vacuum Science and Technology B},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852091},
  language = {en},
}