@article{94236,
  author = {Vivek Prabhu and S Sambasivan and Daniel Fischer and Linda Sundberg and Robert Allen},
  title = {Quantitative Depth Profiling of Photoacid Generators in Photoresist Materials by Near-Edge X-Ray Absorption Fine Structure Spectroscopy},
  year = {2006},
  number = {253},
  month = {2006-05-09},
  publisher = {Applied Surface Science},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852582},
  language = {en},
}