@article{93966,
  author = {Hyun and H Peng and Ken-ich Nihara and Hae-Jeong Lee and Eric Lin and Alamgir Karim and D Gidley and Hiropshi Jinai and Do Yoon and Christopher Soles},
  title = {Self-Sealing Nanoporous Low-k Dielectric Patterns Created by Nanoimprint Lithography},
  year = {2008},
  number = {20},
  month = {2008-04-15},
  publisher = {Advanced Materials},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852758},
  language = {en},
}