@article{92906,
  author = {Chengqing Wang and Ronald Jones and Kwang-Woo Choi and Christopher Soles and Eric Lin and Wen-Li Wu and James Clarke and John Villarrubia and Benjamin Bunday},
  title = {Line Width Roughness and Cross Sectional Measurements of Sub-50 nm Structures with CD-SAXS and CD-SEM},
  year = {2008},
  number = {6922},
  month = {2008-03-24},
  publisher = {SPIE Conference Proceedings},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853580},
  language = {en},
}